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特色：
透過雷射光斷面掃描得到清晰的立體圖像
應用領域：
IC Pattern /電極Pod / Bump /FPP /微機電…等微細觀察及立體量測…(more)
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12”晶元全行程顯微量測平台
Fast and high-precision measurement in 3-axis of 12 inch wafer with Motorized focusing as standard.
All area of 12inch wafer can be inspected and measured on rotatable stage with high performance of UIS optical system.…(more)
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AL110-12 Series
300mm Wafer Manual Inspection System
特色：
1. 操作簡易、安全有效率
2. FOSB/FOUP/OPEN介面可供選擇
3. 特殊目檢照明系統，可依觀察需要做選擇，提高辨識力…(more) |
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